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FSI Smart Cell Machine Charging Mercury FSIs automatically
The FSI Smart Cell enables:
- Cassette/pod handling
- Wafer handling
- Recipe management
- Pod storage and supply
ATG's compact solution ensures optimized throughput while improving workstation ergonomics and traceability reliability.
Performance and Benefits
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Throughput optimisation for loading and unloading machines
![](https://www.atg-technologies.com/wp-content/uploads/2021/11/icon3.png)
Improvement in workstation ergonomics and reduction of MSD risks.
![](https://www.atg-technologies.com/wp-content/uploads/2021/11/icon2.png)
Improvement in the traceability of the process
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Decrease in particulate inputs
Our Solution
FSI: fully automated equipment upgrade solution
FSI Mercury SmartCell is a fully automatic FSI Mercury cell. More than 200 million wafers processed by FSI SmartCells!
Get a Customized Quote for a Tool Loading System
Contact our sales team to obtain a custom quote or documentation for an ATG Technologies Tool loading system.