FSI Smart Cell Machine Charging Mercury FSIs automatically
The FSI Smart Cell enables:
- Cassette/pod handling
- Wafer handling
- Recipe management
- Pod storage and supply
ATG's compact solution ensures optimized throughput while improving workstation ergonomics and traceability reliability.
Performance and Benefits
Throughput optimisation for loading and unloading machines
Improvement in workstation ergonomics and reduction of MSD risks.
Improvement in the traceability of the process
Decrease in particulate inputs
FSI: fully automated equipment upgrade solution
FSI Mercury SmartCell is a fully automatic FSI Mercury cell. More than 200 million wafers processed by FSI SmartCells!
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